ISO 14644 is the international standard used to design, construct, validate and operate a cleanroom. The standard was first published in 1999, and replaced the former US Federal Standard 209E in 2001. The Standard ISO 14644 is composed of the following parts:
- ISO 14644-1: Classification of air cleanliness
- ISO/DIS 14644-1.: Classification of air cleanliness by particle concentration
- ISO 14644-2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1
- ISO/DIS 14644-2.2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
- ISO 14644-3: Test Methods
- ISO 14644-4: Design, Construction, and Start-up
- ISO 14644-5: Operations
- ISO 14644-6: Vocabulary
- ISO 14644-7: Separative devices (clean air hoods, gloveboxes, isolators and minienvironments
- ISO 14644-8: Classification of airborne molecular contamination
- ISO 14644-9: Classification of surface particle cleanliness
- ISO 14644-10: Classification of Surface Cleanliness by Chemical Concentration
- ISO 14644-12: Classification of Air Cleanliness by Nanoscale Particle Concentration
