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Fraunhofer IZM Orders 300mm Pegasus DSi Deep Silicon Etch System on an Omega fxP Platform From SPTS
Written on 2 Jun, 2010 at 16:30 in Interest | viewed 598 times | 0 Comments
SPP Process Technology Systems (SPTS), a supplier of advanced semiconductor capital equipment and process technologies for the global semiconductor industry and related markets, today announced that it has received an order for a Pegasus DSi Deep Silicon etch system supported... (Continue reading)
Fraunhofer IZM Orders 300mm Pegasus DSi Deep Silicon Etch System
Written on 31 May, 2010 at 14:21 in Interest | viewed 408 times | 0 Comments
SPP Process Technology Systems (SPTS), a supplier of advanced semiconductor capital equipment and process technologies for the global semiconductor industry and related markets, today announced that it has received an order for a Pegasus DSi Deep Silicon etch system supported... (Continue reading)
SPTS ships 300mm DRIE to CEA-LETI
Written on 4 Dec, 2009 at 14:08 in Product News | viewed 719 times | 0 Comments
SPP Process Technology Systems (SPTS) and its parent company Sumitomo Precision Products Co., Ltd (SPP), leaders in plasma process technologies for manufacturing micro-electro mechanical systems (MEMS) and advanced semiconductor devices, announced that they have sold their 300mm-compatible DRIE production... (Continue reading)
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