University of Michigan’s Lurie Nanofabrication Facility selects EV Group Wafer Bonding Systems for advanced MEMS research

EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, today announced that it has shipped two wafer bonding systems to the University of Michigan’s Lurie Nanofabrication Facility (LNF) (www.mnf.umich.edu/MNF) –... (Continue reading)