Posts Tagged ‘EUVL’

SEMATECH and Lasertec Partner at UAlbany NanoCollege to Develop TSV Solutions for Chip-Stacking Applications

SEMATECH and Lasertec Partner at UAlbany NanoCollege to Develop TSV Solutions for Chip-Stacking Applications

Lasertec Corporation of Japan has joined SEMATECH’s 3D Interconnect Program at the College of Nanoscale Science and Engineering (CNSE) of the University at Albany, and will partner with SEMATECH to develop robust, cost-effective process metrology technology solutions for readying high-volume... (Continue reading)

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TEL Joins SEMATECH’s Lithography Program at UAlbany NanoCollege

TEL Joins SEMATECH’s Lithography Program at UAlbany NanoCollege

Tokyo Electron Limited (TEL) and SEMATECH today announced that TEL has joined SEMATECH’s Lithography Program at the College of Nanoscale Science and Engineering (CNSE) of the University at Albany. The TEL team will work alongside SEMATECH engineers at CNSE’s Albany NanoTech... (Continue reading)

SEMATECH Kicks Off Consortium at UAlbany NanoCollege to Develop Crucial EUV Metrology Tools

SEMATECH Kicks Off Consortium at UAlbany NanoCollege to Develop Crucial EUV Metrology Tools

SEMATECH has launched a global consortium at the College of Nanoscale Science and Engineering’s (CNSE) Albany NanoTech Complex to develop critical metrology tools for detecting defects in advanced masks needed for extreme ultraviolet lithography (EUVL) – filling an industry need... (Continue reading)

HamaTech APE Completes Initial Stage of EUV Mask Cleaning Program at imec

HamaTech APE Completes Initial Stage of EUV Mask Cleaning Program at imec

HamaTech APE, a SUSS MicroTec company, today announced that it has completed the initial stage of the Extreme Ultraviolet (EUV) Mask Cleaning Program in partnership with imec, a world-leading nanoelectronics research center. With the installation of HamaTech’s MaskTrack Pro, imec’s... (Continue reading)

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Dow Electronic Materials Joins SEMATECH’s Resist Materials and Development Center at UAlbany NanoCollege

Dow Electronic Materials Joins SEMATECH’s Resist Materials and Development Center at UAlbany NanoCollege

SEMATECH, a global consortium of chipmakers, and Dow Electronic Materials announced today that Dow has joined SEMATECH’s Resist Materials and Development Center (RMDC) at the College of Nanoscale Science and Engineering (CNSE) of the University at Albany. To advance the development... (Continue reading)

UCSD Scientists Shed ‘Light” on Growing Semiconductor Quandary

UCSD Scientists Shed ‘Light” on Growing Semiconductor Quandary

UC San Diego scientists are using laser plasma-produced light sources to explore performance improvements of critical inspection tools for the semiconductor industry, which ultimately will enable industry to pursue even better and faster chips. While optical lithography is being pushed... (Continue reading)