Tegal Receives Silicon Drie Tool Order From Uppsala University

Written on 19 May, 2010 at 17:30 in Interest | viewed 345 times | 0 Comments

Tegal Corporation, (Nasdaq: TGAL) an innovator of specialized production solutions for the fabrication of advanced MEMS, power ICs and optoelectronic devices, today announced it has received an order for a Tegal 110 S/DE DRIE tool from Uppsala University. The... (Continue reading)