Lucent Technologies MOS V Cleanroom

A look at Lucent Technologies MOS V Cleanroom in Allentown, Pennsylvania.  MOS standing for Metal Oxide Semiconductor, and V being the fifth of their cleanrooms. MOS V was a class 10 cleanroom. The MOS V cleanroom was built in 1984, but has since closed down. The cleanroom preformed Chemical Clean, Oxidation/CVD, Photolithography, Ion Implantation, Plasma Etch and Metal Deposition.

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